期刊
SENSORS
卷 20, 期 17, 页码 -出版社
MDPI
DOI: 10.3390/s20174784
关键词
microcantilever; atomic force microscope; ultra-short cantilevers; high-speed atomic force microscope; biosensors
资金
- Basic Science Research Program through the National Research Foundation of Korea (NRF) - Ministry of Science and ICT [NRF-2018R1A2B6008264]
This review critically summarizes the recent advances of the microcantilever-based force sensors for atomic force microscope (AFM) applications. They are one the most common mechanical spring-mass systems and are extremely sensitive to changes in the resonant frequency, thus finding numerous applications especially for molecular sensing. Specifically, we comment on the latest progress in research on the deflection detection systems, fabrication, coating and functionalization of the microcantilevers and their application as bio- and chemical sensors. A trend on the recent breakthroughs on the study of biological samples using high-speed atomic force microscope is also reported in this review.
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