4.5 Article

Highly sensitive FBG pressure sensor based on square diaphragm

期刊

OPTIK
卷 225, 期 -, 页码 -

出版社

ELSEVIER GMBH
DOI: 10.1016/j.ijleo.2020.165559

关键词

Fiber Bragg grating; Pressure sensor; Square diaphragm; Sensitivity; Temperature compensation

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资金

  1. Scientific Research Program - Shaanxi Provincial Education Department [17JS105]

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A highly sensitive fiber Bragg grating (FBG) based square diaphragm pressure sensor has been designed and verified both in theory and experiment, demonstrating excellent pressure sensitivity and a high coefficient of determination. The sensor exhibits low hysteresis, good repeatability, and resolution, with remarkable temperature compensation. It is cost-effective, suitable for low pressure measurement, and has a relative error of 3.13%.
A highly sensitive fiber Bragg grating (FBG) based square diaphragm pressure sensor has been designed and verified both in theory and experiment. The square diaphragm deflects due to the pressure difference generated at both sides of the square, and causes the compression along the axis of the pre-stretched FBG. The experimental results indicate that the pressure sensitivity of the proposed sensor reaches 3.402 pm/kPa in the range of 0-200 kPa with a higher coefficient of determination of 0.9985. Meanwhile, the sensor is found to present low hysteresis, good repeatability and resolution. Relative error recorded at 3.13 % represents that the effect of the temperature compensation is remarkable. Furthermore, the designed pressure sensor is simple, cost-effective and suitable for low pressure measurement.

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