期刊
MICROSCOPY AND MICROANALYSIS
卷 26, 期 5, 页码 944-963出版社
CAMBRIDGE UNIV PRESS
DOI: 10.1017/S1431927620024307
关键词
4D-STEM; fast pixelated detector; higher-order Laue zone; scanning precession electron diffraction; virtual detectors
资金
- Engineering and Physical Sciences Research Council (EPSRC) of the UK via the project Fast Pixel Detectors: a paradigm shift in STEM imaging [EP/M009963/1]
- EPSRC [EP/M009963/1, EP/M024423/1, EP/N509668/1, EP/R511705/1]
- European Union's Horizon 2020 research and innovation programme under the Marie Sklodowska-Curie grant [838001]
- UK Science and Technology Facilities Council (STFC) Industrial CASE studentship Next2 TEM Detection [ST/P002471/1]
- Quantum Detectors Ltd.
- NanoMEGAS
- Marie Curie Actions (MSCA) [838001] Funding Source: Marie Curie Actions (MSCA)
- EPSRC [EP/M024423/1, EP/M009963/1] Funding Source: UKRI
Fast pixelated detectors incorporating direct electron detection (DED) technology are increasingly being regarded as universal detectors for scanning transmission electron microscopy (STEM), capable of imaging under multiple modes of operation. However, several issues remain around the post-acquisition processing and visualization of the often very large multidimensional STEM datasets produced by them. We discuss these issues and present open source software libraries to enable efficient processing and visualization of such datasets. Throughout, we provide examples of the analysis methodologies presented, utilizing data from a 256 x 256 pixel Medipix3 hybrid DED detector, with a particular focus on the STEM characterization of the structural properties of materials. These include the techniques of virtual detector imaging; higher-order Laue zone analysis; nanobeam electron diffraction; and scanning precession electron diffraction. In the latter, we demonstrate a nanoscale lattice parameter mapping with a fractional precision <= 6 x 10(-4) (0.06%).
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