4.5 Article

Size-dependency effect on design of harmonic AFM probe in the modified couple stress theory

期刊

MECHANICS OF ADVANCED MATERIALS AND STRUCTURES
卷 29, 期 9, 页码 1257-1265

出版社

TAYLOR & FRANCIS INC
DOI: 10.1080/15376494.2020.1814909

关键词

AFM; design of probe; modified couple stress theory; size dependency; analytical method; integer-multiples relation; resonant frequency

资金

  1. Ministry of Science and Technology of Taiwan, R. O. C. [MOST 108-2221-E-168-009]

向作者/读者索取更多资源

This paper presents a mathematical model of an AFM nonuniform probe in the modified couple stress theory and proposes an analytical method for designing the configuration of the AFM probe satisfying the integer-multiples relation among frequencies. By tuning the varying cross-section of the probe, specific requirements can be met, and the relations among the natural frequencies, the effective spring constant, and the geometry parameters are discovered. Specific frequencies and spring constant can be obtained by adjusting the probe parameters via these relations.
The mathematical model of an AFM nonuniform probe in the modified couple stress theory is derived here. The analytical method is proposed to design the configuration of the AFM probe satisfying the integer-multiples relation among frequencies. The varying cross-section of the probe is tuned to match the specific requirement. One discovers two similarity conditions such that the integer-multiples relation is kept in spite of the size-dependency parameter. Moreover, the relations among the natural frequencies, the effective spring constant and the geometry parameters are discovered. The specific frequencies and spring constant can be obtained by tuning the probe parameters via the relations.

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