期刊
MATERIALS AND MANUFACTURING PROCESSES
卷 36, 期 1, 页码 17-26出版社
TAYLOR & FRANCIS INC
DOI: 10.1080/10426914.2020.1813890
关键词
Modification; silicon; grinding; slot; manufacturing; micro; ultra-precision; tool; wear
资金
- National Natural Science Foundation of China [51875192, 51675170]
- Fundamental Research Funds for the Central Universities [531118010341]
The proposed hybrid micro-grinding process utilizes a chemical modification solution to soften the surface layer for manufacturing ultra-precision meso/micro components of monocrystalline silicon. Compared with the conventional micro-grinding process, this technique achieves superior machining quality and significantly reduces tool wear.
The recent paper proposes a hybrid micro-grinding process for ultra-precision meso/micro components of monocrystalline silicon manufacturing. The proposed technique utilizes the chemical modification solution to modify and soften the surface layer and then manufactures meso/micro-structures via micro-grinding. A special chemical solution with optimized formula was prepared, and a 0.31 mm diameter, CVD diamond micro-grinding tool is hired to perform the micro-grinding action at 100,000 rpm of spindle speed, 0.2 mm/min of feed rate, and a machining depth of 10 mu m. The results show that the proposed hybrid micro-grinding process achieves a superior machining quality compared with the conventional micro-grinding process. Moreover, the micro-grinding tool used in the proposed grinding strategy has far smaller tool wear than the conventional process.
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