期刊
JOURNAL OF PHYSICS D-APPLIED PHYSICS
卷 54, 期 2, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1361-6463/abbf79
关键词
SiON dielectric; interface traps; metal-insulator-semiconductor structure; field effect transistor; high electron mobility transistor
资金
- National Natural Science Foundation of China [61971090, 51607022]
- Science and Technology Major Project of Dalian [2019ZD14GX004]
- Fundamental Research Funds for the Central Universities [DUT20LK10]
- Open Project Program of Key Lab of Semiconductor Materials Science [KLSMS-1804]
- Science and Technology Major Project of Liaoning Province [2019JH1/10100021]
This study investigated the electrical characteristics of the SiON/AlGaN and SiON/GaN interfaces using fabricated metal-insulator-semiconductor devices. The over-etching in the gate trench resulted in higher trap state density at the SiON/GaN interface, leading to a more obvious degradation of subthreshold swing. Traps located at the SiON/AlGaN interface were found to be at a deeper energy level, causing a greater threshold voltage shift in the drain-bias stress measurement.
In this work, we performed an investigation on the electrical characteristics of the interfaces of SiON/AlGaN and SiON/GaN by fabricating a partially gate-recessed metal-insulator-semiconductor high electron mobility transistor (MIS-HEMT) and a fully gate-recessed metal-insulator-semiconductor field-effect transistor (MIS-FET). The fabricated MIS-HEMT exhibits a smaller static on-resistance (R-on) of 12.7 omega center dot mm, while the MIS-FET achieves the normally-off operation. As a result of over-etching in the gate trench, a higher trap state density of 2 x 10(13) cm(-2)eV(-1) at the SiON/GaN interface in comparison to SiON/AlGaN interface (8 x 10(12) cm(-2)eV(-1)), leading to a more obvious degradation of subthreshold swing, was extracted after performing the high temperature I-DS-V-GS tests. In addition, compared with the MIS-FET, the traps distributed at the SiON/AlGaN interface are found to be located at a deeper energy level, which make the device more stress sensitive and can cause a greater threshold voltage (V-th) shift in the drain-bias stress measurement. The drain-bias stress at off-state increases the ionized trap density and makes the ionized traps unrecoverable within 1000 s in the MIS-HEMT. This work reveals the different properties of traps states at the SiON/AlGaN and SiON/GaN interfaces, and their effects on the device reliability.
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