期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 29, 期 5, 页码 1304-1313出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2020.3005437
关键词
Microelectromechanical systems (MEMS) switch; MEMS relay; microswitch; high power; contact force; contact resistance; reliability; relay
类别
资金
- Commercialization Promotion Agency for Research and Development Outcomes (COMP) - Ministry of Science and ICT (MSIT) [2019K000067]
- Future Non-Volatile Cluster Academia Collaboration Program - Samsung Electronics
This paper reports on the unprecedented 4 W power microelectromechanical systems (MEMS) relay with a contact- force-maximizing structure in a dual-contact material system. A MEMS relay with dual (hard and soft) contact materials is known to have high durability in hot-switching conditions, and the contact force is also considered to be the most important factor that contributes to an efficient reduction of the contact resistance. We devised a contact-force-maximizing structure with a plate-type suspended structure and in-plate springs and applied it to a dual-contact material system to achieve extremely low contact resistance. The fabricated MEMS relay successfully operated sequential switching between the dual contact materials in the contact-force-maximizing structure and thereby showed an extremely low contact resistance of 1.65 m Omega with a switching time of 7 mu s at an operating voltage of 80 V. Thanks to the contact-force-maximizing structure with the dual-contact material system, the fabricated MEMS relay achieved a lifetime of up to 1.3 x 10(3) cycles in the hot-switching conditions of 4 W (10 V/400 mA) in an air atmosphere with a negligible variation of the contact resistance. This power level is the highest reported to date. [2020-0223]
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