A self-organized approach for scheduling semiconductor manufacturing systems

In semiconductor manufacturing industry, traditional scheduling rules are not conducive to improving production capacity to autonomously adjust based on real-time status. To fill this gap, this study proposes a dynamic dispatching rule based on self-organization (DDRSO) to autogenerate optimal scheduling scheme through mechanisms of interaction, coordination and competition. Besides, an extended DDRSO is proposed to further consider hot lots and transient dynamic bottlenecks. Both DDRSO and E-DDRSO are designed from three aspects: role definition of self-organization units, negotiation mechanism among self-organization units, and decision methods. This research adopts a benchmark industrial manufacturing system to illustrate the availability of the proposed approach. Compared with heuristic dispatching strategies, DDRSO achieves improvement on MOV, TH and ODR by 4.9%, 9.06% and 20.23%, respectively. Meanwhile, E-DDRSO performs better than DDRSO under all workload levels. In addition, compared with a flexible dispatching method BPSO-SVM, E-DDRSO also obtain better performances, especially improvement on CT by 16.51%.

Automated summary

The study proposes dynamic dispatching rules based on self-organization (DDRSO) to optimize scheduling schemes through interaction, coordination, and competition, considering hot lots and transient bottlenecks. DDRSO achieves improvements in MOV, TH and ODR by 4.9%, 9.06% and 20.23% respectively, while the extended E-DDRSO outperforms DDRSO across all workload levels. Additionally, E-DDRSO shows better performance compared to a flexible dispatching method BPSO-SVM, especially in terms of reducing cycle time by 16.51%.