期刊
JOURNAL OF CRYSTAL GROWTH
卷 547, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.jcrysgro.2020.125805
关键词
Nitridation mechanism; Semiconducting III-V materials; Nanomaterials; Van der Waals epitaxy; Molecular beam epitaxy
资金
- National Key Research and Development Program [2018YFB0406601]
- Science Challenge Project [TZ2016003]
- National Natural Science Foundation of China [61822404, 61875104, 61904093, 61927811, 61975093, 61974080]
- Tsinghua University Initiative Scientific Research Program [20161080068, 20161080062, 20193080036]
- Key Lab Program of BNRist [BNR2019ZS01005]
- Basic Research Priorities Program of Shenzhen [JCYJ20160608170030295]
- China Postdoctoral Science Foundation [2018M640129, 2019T120090]
- Collaborative Innovation Centre of Solid-State Lighting and Energy-Saving Electronics
Growing III-nitride semiconductors on non-single-crystalline substrates at low temperature is essential to realize low-cost and large-area GaN-based transferable and flexible devices. Two-dimensional (2D) layered materials such as graphene have the similar in-plane lattice arrangements compare with III-nitrides, hence III-nitrides can be grown on various non-single-crystal substrates through van der Waals epitaxy (vdWE) assisted by 2D layered material. Nevertheless, because of the low chemical reactivity of perfect graphene surface, it is hard to obtain high-quality GaN thin film with smooth surface without any artificial treatments at the initial stage of epitaxy growth. In this work, the influence of nitridation process on vdWE grown III-nitride films on graphene/quartz substrates has been investigated by using plasma-assisted molecular beam epitaxy. It is demonstrated that moderate intentional defects can be introduced into the surface of graphene/quartz substrate by N-2 plasma treatments in the initial stages of vdWE, which is beneficial to the following nucleation process of III-nitrides. Besides, suitable nitridation conditions are essential in order to obtain high-quality GaN film on graphene/quartz substrates at low growth temperature. Such results can act as paradigms for vdWE of III-nitrides when using other 2D layered materials or non-single-crystalline substrates.
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