{001}-textured Pb(Zr, Ti)O3 thin films on stainless steel by pulsed laser deposition

In this work, we report nearly single oriented {001}-textured ferroelectric PbZr0:52Ti0:48O3 thin films grown by pulsed laser deposition onto AISI 304 stainless steel substrates. Pt, Al2O3, and LaNiO3 buffer layers promote the PbZr0:52Ti0:48O3 {001} texture and protect the substrate against oxidation during deposition. The dominant {001} texture of the PbZr0:52Ti0:48O3 layer was confirmed using x-ray and electron backscatter diffraction. Before poling, the films exhibit a permittivity of about 350 at 1 kHz and a dielectric loss below 5%. The films display a remanent polarization of about 16:5 mu Ccm(2) and a high coercive field of up to E-c 1/4 135:9 kVcm(-1). The properties of these PbZr0:52Ti0:48O3 thin films on stainless steel are promising for various MEMS applications such as transducers or energy harvesters.