Confocal laser scanning holographic microscopy of buried structures

In this paper, we present a confocal laser scanning holographic microscope for the investigation of buried structures. The multimodal system combines high diffraction limited resolution and high signal-to-noise-ratio with the ability of phase acquisition. The amplitude and phase imaging capabilities of the system are shown on a test target. For the investigation of buried integrated semiconductor structures, we expand our system with an optical beam induced current modality that provides additional structure-sensitive contrast. We demonstrate the performance of the multimodal system by imaging the buried structures of a microcontroller through the silicon backside of its housing in reflection geometry. (C) 2020 Optical Society of America

Automated summary

This paper introduces a confocal laser scanning holographic microscope for investigating buried structures, which combines high diffraction limited resolution and high signal-to-noise-ratio with phase acquisition ability. The amplitude and phase imaging capabilities are demonstrated on a test target, and an optical beam induced current modality is added for studying buried integrated semiconductor structures, providing additional structure-sensitive contrast. The performance of the multimodal system is demonstrated by imaging the buried structures of a microcontroller through the silicon backside in reflection geometry.