期刊
ACS APPLIED MATERIALS & INTERFACES
卷 12, 期 41, 页码 46892-46899出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsami.0c12148
关键词
transparent conducting oxide; TCO; amorphous oxide semiconductor; zinc tin oxide; ZTO; spray pyrolysis; X-ray photoelectron spectroscopy; XPS
资金
- Science Foundation Ireland [12/IA/1264]
- Irish Research Council Laureate Award [IRCLA/2019/171]
- Government of the Republic of Kazakhstan
Transparent conductive oxides (TCOs) are important materials for a wide range of optoelectronic devices. Amorphous zinc tin oxide (a-ZTO) is a TCO and one of the best nontoxic, low-cost replacements for more expensive amorphous indium-gallium-zinc oxide. Here, we employ spray pyrolysis (SP), an inexpensive and versatile chemical vapor deposition-based technique, to synthesize a-ZTO with an as-deposited conductivity of approximate to 300 S/cm-the highest value hitherto among the reported solution-processed films. Compositional analysis via X-ray photoelectron spectroscopy reveals a nonstoichiometric transfer of Zn and Sn from the dissolved precursors into the film, with the best electrical properties achieved at a film composition of x(flim) = 0.38 +/- 0.04 ((ZnO)(x)(SnO2)(1-x) (0 < x < 1)). The morphology of these films is compared to films synthesized by physical vapor deposition (PVD), and a strong correlation between morphology and electrical properties is revealed. The granular nature of the SP-grown films, which seems like a drawback at first glance, brings about the prospect of using a-ZTO in ink-jet-printed films from a nanoparticle suspension for the room-temperature deposition. Brief post-anneal cycles in N-2 gas improve the conductivity of the films by means of grain boundary (GB) passivation.
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