Experimental study on direct fabrication of micro channel on fused silica by picosecond laser

Ultrafast laser ablation, known for its high precision and the depressed thermal influence during processing, is fevered in micro channel fabrication on the glass bulk. In present work, a micro channel structure fabricated on fused silica bulk by a picosecond pulsed laser is parametrically investigated with different processing environments, scanning velocities, pulse energies, hatch distances and repetitive scans. The best processing parameters are determined through the material remove rate and the bottom surface roughness of the channel. Moreover, the fabrication defect attributed to the heat accumulation effect is analyzed by Raman spectrum. A scanning strategy is put forward to compensate the asymmetry in the cross section of the micro channels.