期刊
ACS PHOTONICS
卷 7, 期 8, 页码 2197-2203出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsphotonics.0c00701
关键词
in-plane displacement sensor; position-sensitive detector; nanoelectromechanical resonators; photothermal effect
类别
资金
- European Research Council under the European Union [716087-PLASMECS]
Subnanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. Here, we present an integrated nanoelectromechanical in-plane displacement sensor based on a nanoelectromechanical trampoline resonator. With a position resolution of 4 pm/root Hz for a low laser power of 85 mu W and a repeatability of 2 nm after five cycles of operation as well as good long-term stability, this new detection principle provides a reliable alternative for overcoming the current position detection limit in a wide variety of research and application fields.
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