期刊
ACS PHOTONICS
卷 7, 期 7, 页码 1655-1661出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsphotonics.0c00753
关键词
anapole mode; third harmonic generation; deep-ultraviolet; silicon photonics; few-cycle laser; ultrafast nonlinear optics; all-dielectric nanoantennas
类别
资金
- Deutsche Forschungsgemeinschaft (DFG) [KO 3798/4-1]
- German Research Foundation under Germany's Excellence Strategy [EXC-2123]
- German Research Foundation under Germany's Excellence Strategy within the Cluster of Excellence PhoenixD [EXC 2122, 390833453]
- German Research Foundation under Germany's Excellence Strategy within The Berlin Mathematics Research Center MATH+ [EXC-2046/1, 390685689]
- Lower Saxony through Quanten und Nanometrologie (QUANOMET, Project Nanophotonik)
- Villum Fonden [16498]
- DFG (German Research Foundation) [RE3012/4-1, RE3012/2-1]
Nanoantennas made of high-index semiconductors with a strong nonlinearity and supported optical Mie-type resonances offer a promising alternative platform for nonlinear nanophotonics. In this Letter, we employ an array of amorphous silicon nanodisks with varying diameters to produce a broadband deep-ultraviolet third harmonic of a few-cycle Ti:sapphire oscillator. Ultrashort light pulses efficiently deposit their energy at the center of the disks where the electric field is strongly amplified by the anapole states. This leads to a progressive material modification in an extreme multishot (>10(10)pulses) and a rather low fluence (<10(-3) J/cm(2)) regime, drastically differing from other known mechanisms, such as nonthermal plasma annealing or thermal melting-induced recrystallization. We suggest that the material modification is due to femtosecond laser-induced excitation of dangling bonds, which leads to a gradual boosting of the third harmonic conversion efficiency and broadening of its spectral bandwidth.
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