4.4 Article

Relationship between mobility and strain in CVD graphene onh-BN

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AIP ADVANCES
卷 10, 期 8, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/5.0019621

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资金

  1. New Energy and Industrial Technology Development Organization (NEDO) [JPNP16010]
  2. Elemental Strategy Initiative by the MEXT, Japan [JPMXP 0112101001]
  3. JSPS KAKENHI [JP20H00354]
  4. CREST, JST [JPMJCR15F3]
  5. IBEC Innovation Platform

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This study examines the relationship between the electrical properties and Raman spectra of field effect transistors (FETs) produced using chemical vapor deposited (CVD) graphene transferred onto hexagonal boron nitride (h-BN) structures. Carrier mobility values were calculated based on the electrical properties of the fabricated FETs, where the highest carrier mobility was 39 989 cm(2)/Vs. Carrier mobility increased with a decrease in the full width at half maximum (FWHM) of the 2D-band peak of CVD graphene. A linear relationship with a slope of 2.18 between the G-band and 2D-band peak positions was detected, indicating that a uniaxial strain existed in the CVD graphene FETs. Based on the peak shifts in the 2D-band, it was determined that both compressive and tensile strains were responsible for limiting carrier mobility. Ultimately, the analysis of peak positions and FWHMs of 2D-bands enabled us to evaluate the uniformity of electrical properties of CVD graphene without fabricating specialized measurement devices.

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