期刊
AIP ADVANCES
卷 10, 期 6, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/5.0002100
关键词
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资金
- (JSPS) KAKENHI [17H03237, 18KK0134]
- Advanced Graduate Program in Global Strategy for Green Asia, Kyushu University
- Grants-in-Aid for Scientific Research [18KK0134, 17H03237] Funding Source: KAKEN
Interface traps (ITs) and border traps (BTs) in Al2O3/GeOx/p-Ge gate stacks were characterized using deep-level transient spectroscopy. Through evaluating the gate stacks with different GeOx thicknesses, the respective BTs in Al2O3, the Al2O3/GeOx interface region, and GeOx were detected. The density of ITs (D-it) near the midgap is lower in the metal-oxide-semiconductor (MOS) capacitors with thicker GeOx, while D-it near the valence band is lower in the MOS capacitor with thinner GeOx. The density of BTs (N-bt) in Al2O3 (6-9 x 10(17) cm(-3)) is lower than those in GeOx (similar to 2 x 10(18) cm(-3)), and the highest N-bt (similar to 1 x 10(19) cm(-3)) was found in the Al2O3/GeOx interface region. Ge p-channel metal-oxide-semiconductor field-effect-transistors (MOSFETs) with Al2O3/GeOx/p-Ge gate stacks were fabricated and analyzed. We confirmed that the ITs and the BTs near the valence band edge of Ge affect the effective mobility of Ge p-MOSFETs in the high-field region.
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