相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。Leveraging of MEMS Technologies for Optical Metamaterials Applications
Zhihao Ren et al.
ADVANCED OPTICAL MATERIALS (2020)
Full Electrostatic Control of Nanomechanical Buckling
Selcuk Oguz Erbil et al.
PHYSICAL REVIEW LETTERS (2020)
Low-power optical beam steering by microelectromechanical waveguide gratings
Carlos Errando-Herranz et al.
OPTICS LETTERS (2019)
Multicast silicon photonic MEMS switches with gap-adjustable directional couplers
Sangyoon Han et al.
OPTICS EXPRESS (2019)
Phonon heat transfer across a vacuum through quantum fluctuations
King Yan Fong et al.
NATURE (2019)
Advances in quantum light emission from 2D materials
Chitraleema Chakraborty et al.
NANOPHOTONICS (2019)
GHz nanomechanical resonator in an ultraclean suspended graphene p-n junction
Minkyung Jung et al.
NANOSCALE (2019)
Nano-opto-electro-mechanical systems
Leonardo Midolo et al.
NATURE NANOTECHNOLOGY (2018)
Contactless four-terminal MEMS variable capacitor for capacitive adiabatic logic
A. Galisultanov et al.
SMART MATERIALS AND STRUCTURES (2018)
Phonon-Number-Sensitive Electromechanics
J. J. Viennot et al.
PHYSICAL REVIEW LETTERS (2018)
Invited Article: Tuning and stabilization of optomechanical crystal cavities through NEMS integration
Karen E. Grutter et al.
APL PHOTONICS (2018)
Energy-dependent path of dissipation in nanomechanical resonators
Johannes Guttinger et al.
NATURE NANOTECHNOLOGY (2017)
Measurement of non-monotonic Casimir forces between silicon nanostructures
L. Tang et al.
NATURE PHOTONICS (2017)
Scaling laws for gas breakdown for nanoscale to microscale gaps at atmospheric pressure
Amanda M. Loveless et al.
APPLIED PHYSICS LETTERS (2016)
Reconfigurable nanomechanical photonic metamaterials
Nikolay I. Zheludev et al.
NATURE NANOTECHNOLOGY (2016)
Design of tunable GHz-frequency optomechanical crystal resonators
Hannes Pfeifer et al.
OPTICS EXPRESS (2016)
Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
Han Du et al.
MICROMACHINES (2016)
Mechanics of freely-suspended ultrathin layered materials
Andres Castellanos-Gomez et al.
ANNALEN DER PHYSIK (2015)
Coupling Graphene Mechanical Resonators to Superconducting Microwave Cavities
P. Weber et al.
NANO LETTERS (2014)
Optical detection of radio waves through a nanomechanical transducer
T. Bagci et al.
NATURE (2014)
Electrostatic pull-in instability in MEMS/NEMS: A review
Wen-Ming Zhang et al.
SENSORS AND ACTUATORS A-PHYSICAL (2014)
Coherent state transfer between itinerant microwave fields and a mechanical oscillator
T. A. Palomaki et al.
NATURE (2013)
Nanomechanical coupling between microwave and optical photons
Joerg Bochmann et al.
NATURE PHYSICS (2013)
The fringe capacitance formula of microstructures
Wan-Chun Chuang et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2012)
Properties of suspended graphene membranes
Chun Ning Lau et al.
MATERIALS TODAY (2012)
Realizing effective magnetic field for photons by controlling the phase of dynamic modulation
Kejie Fang et al.
NATURE PHOTONICS (2012)
Scaling electromechanical sensors down to the nanoscale
Michael A. Cullinan et al.
SENSORS AND ACTUATORS A-PHYSICAL (2012)
Ultracompact Phase Modulator Based on a Cascade of NEMS-Operated Slot Waveguides Fabricated in Silicon-on-Insulator
K. Van Acoleyen et al.
IEEE PHOTONICS JOURNAL (2012)
Single and multiple optical switches that use freestanding silicon nanowire waveguide couplers
Yuta Akihama et al.
LIGHT-SCIENCE & APPLICATIONS (2012)
Sideband cooling of micromechanical motion to the quantum ground state
J. D. Teufel et al.
NATURE (2011)
Laser Cooling and Optical Detection of Excitations in a LC Electrical Circuit
J. M. Taylor et al.
PHYSICAL REVIEW LETTERS (2011)
A chip-scale integrated cavity-electro-optomechanics platform
M. Winger et al.
OPTICS EXPRESS (2011)
Effects of size and defects on the elasticity of silicon nanocantilevers
Hamed Sadeghian et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2010)
Dynamic tuning of an optical resonator through MEMS-driven coupled photonic crystal nanocavities
Xiongyeu Chew et al.
OPTICS LETTERS (2010)
Submicrometer Comb-Drive Actuators Fabricated on Thin Single Crystalline Silicon Layer
Kazunori Takahashi et al.
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS (2009)
Imaging mechanical vibrations in suspended graphene sheets
D. Garcia-Sanchez et al.
NANO LETTERS (2008)
MEMS technology for timing and frequency control
Clark T. -C. Nguyen
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL (2007)
Electromechanical resonators from graphene sheets
J. Scott Bunch et al.
SCIENCE (2007)
How slender can comb-drive fingers be?
D Elata et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2005)
Advanced plasma processing combined with trench isolation technology for fabrication and fast prototyping of high aspect ratio MEMS in standard silicon wafers
E Sarajlic et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2004)
A reduced-order model for electrically actuated microbeam-based MEMS
MI Younis et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2003)
Design of large deflection electrostatic actuators
JD Grade et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2003)
Quantum mechanical actuation of microelectromechanical systems by the Casimir force
HB Chan et al.
SCIENCE (2001)
Nonlocal problems in MEMS device control
JA Pelesko et al.
JOURNAL OF ENGINEERING MATHEMATICS (2001)
分享论文
