期刊
OPTICS EXPRESS
卷 28, 期 18, 页码 25879-25893出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.399777
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- Brain Korea 21 Plus
- Institute of Engineering Research at Seoul National University
- Institute of Advanced Machines and Design at Seoul National University
Spectroscopic snap-shot ellipsometry of co-axial structure is proposed to solve the large spot size and long measurement time issues of the conventional ellipsometer. By modulating the spectroscopic ellipsometry signal into high-frequency at the spectral domain and measuring the spectrum at the point of the back focal plane, the ellipsometry parameters(Delta, psi) were measured in real-time with small spot size. Detailed analysis, calibration, and optimization process for the proposed methods are presented. The accuracy and precision of the proposed method were confirmed by comparing the thickness measurement result of SiO2/Si thin-film samples with a commercial ellipsometer. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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