期刊
OPTICS EXPRESS
卷 28, 期 14, 页码 21275-21285出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.395796
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- Electronic Components and Systems for European Leadership (MICROPRINCE) [737465]
- H2020 LEIT Information and Communication Technologies (PIX4LIFE) [688519]
We demonstrate waveguide-detector coupling through the integration of GaAs p-i-n photodiodes (PDs) on top of silicon nitride grating couplers (GCs) by means of transfer-printing. Both single device and arrayed printing is demonstrated. The photodiodes exhibit dark currents below 20 pA and waveguide-referred responsivities of up to 0.30 A/W at 2V reverse bias, corresponding to an external quantum efficiency of 47% at 860 nm. We have integrated the detectors on top of a 10-channel on-chip arrayed waveguide grating (AWG) spectrometer, made in the commercially available imec BioPIX-300 nm platform. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
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