期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 30, 期 9, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1361-6439/ab999c
关键词
printing; patterning; distortion; registration; alignment; positioning error; polynomial fitting
类别
资金
- JSPS KAKENHI [19K05134]
- Grant for Young Researchers, Japan Prize Foundation
- Grants-in-Aid for Scientific Research [19K05134] Funding Source: KAKEN
The repeatability of manufacturing process is one of the prerequisite aspects in printed electronics. Particularly, the requirement for the positioning accuracy becomes severe as the miniaturization of printed traces develops, patterning area enlarges, and potential applications widen. Therefore, a measure to quantify the effect of various processing parameters on the global registration error of printed patterns is highly important. In this study, the effect of typical processing parameters appeared in a roll-to-sheet, high-resolution printing (reverse offset printing) including synchronization mismatch, tilting of the roll, unevenness of substrate, were systematically investigated. A fitting model on the basis of Spread polynomials successfully decomposed complicated geometrical distortions into basic components such as scale, skew, rotation, trapezoid, and quadratic warping. The relationship between geometrical distortions and processing parameters was summarized.
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