Low temperature deposition of high quality single crystalline AlN thin films on sapphire using highly oriented monolayer MoS 2 as a buffer layer

JOURNAL OF CRYSTAL GROWTH

卷 544, 期 -, 页码 -

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Crystallography Materials Science, Multidisciplinary Physics, Applied

1. Ministry of Science and Technology of Taiwan [106-2221-E-033-067, 107-2221-E-033-048, 107-2112-M-009-024-MY3, 108-2119-M-009-011-MY3]