期刊
ELECTRONIC MATERIALS LETTERS
卷 16, 期 5, 页码 466-472出版社
KOREAN INST METALS MATERIALS
DOI: 10.1007/s13391-020-00236-x
关键词
Passivation film; Parylene C; Aluminum nitride; Sputtering; Organic light-emitting diode; Lifetime
资金
- Collabo R&D between Industry, Academy, and Research Institute - Korea Ministry of SMEs and Startups in 2020 [S2737207]
- research fund of Hanbat National University in 2016
- Basic Science Research Program through the National Research Foundation of Korea (NRF) - Ministry of Education [2018R1A6A1A03026005]
- Korea Technology & Information Promotion Agency for SMEs (TIPA) [S2737207] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Poly-para-xylylene C (Parylene C) and Aluminium Nitride (AlN) multilayered thin films using a single chamber are proposed to achieve transparent passivation for organic light-emitting diodes (OLED). Parylene C-AlN multilayered thin films were obtained through a sequential deposition of Parylene C layers by an optimized chemical vapor deposition as well as deposition of AlN layers by radio frequency reactive sputtering within a short process time at room temperature. An OLED passivated with the thin film showed a significant extension of shelf-life of 400 h at 25 degrees C and 30% RH without any formation of dark spots during the shelf-life analysis, while a reference OLED without any passivation film was degraded within 24 h. In addition, the multilayered passivation films exhibited considerable optical transparency with transmittance greater than 85% in the visible range. This result demonstrates that Parylene C-AlN multilayered films can be successfully deposited within a short time at room temperature in a single chamber for passivation applications in transparent flexible OLEDs and other organic electronic devices.
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