期刊
ANGEWANDTE CHEMIE-INTERNATIONAL EDITION
卷 59, 期 47, 页码 21129-21134出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/anie.202008697
关键词
electrochemical nanomachining; nanopatterning; SECM; semiconductors
资金
- National Natural Science Foundation of China [21827802, 21621091, 21573054, 21327002]
- Fundamental Research Funds for the Central Universities [20720190023]
Scanning electrochemical microscopy (SECM) is one of the most important instrumental methods of modern electrochemistry due to its high spatial and temporal resolution. We introduced SECM into nanomachining by feeding the electrochemical modulations of the tip electrode back to the positioning system, and we demonstrated that SECM is a versatile nanomachining technique on semiconductor wafers using electrochemically induced chemical etching. The removal profile was correlated to the applied tip current when the tip was held stationary and when it was moving slowly (<20 mu m s(-1)), and it followed Faraday's law. Both regular and irregular nanopatterns were translated into a spatially distributed current by the homemade digitally controlled SECM instrument. The desired nanopatterns were sculpted directly on a semiconductor wafer by SECM direct-writing mode. The machining accuracy was controlled to the sub-micrometer and even nanometer scales. This advance is expected to play an important role in electrochemical nanomachining for 3D micro/nanostructures in the semiconductor industry.
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