期刊
ACS APPLIED MATERIALS & INTERFACES
卷 12, 期 28, 页码 32106-32118出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsami.0c05858
关键词
a-SiNx:H/n-SiOxNy/h-SiOx; ultralow water permeation barrier film; water vapor transmission rate (WVTR); organic light-emitting diodes (OLEDs); lifetime
资金
- R&D program of Ministry of Trade, Industry, and Energy/Korea Institute of Energy Technology Evaluation and Planning (MOTIE/KETEP) [20153030012720]
- Ministry of Science and ICT/National Research Foundation (MSIT/NRF) [2017M1A2A2048879]
- Korea Evaluation Institute of Industrial Technology (KEIT) [20153030012720] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- National Research Foundation of Korea [2017M1A2A2048879] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Organic electronic devices such as organic light-emitting diodes (OLEDs), quantum dot LEDs, and organic photovoltaics are promising technologies for future electronics. However, achieving long-term stability of organic-based optoelectronic devices has been regarded as a crucial problem to be solved. In this work, a simple and reproducible fabrication method for ultralow water permeation barrier films having a triple-layered (triad) hydrogenated silicon nitride (a-SiNx:H)/nanosilicon oxynitride (n-SiOxNy)/hybrid silicon oxide (h-SiOx) multistructure is presented. Two triad (a-SiNx:H/n-SiOxNy/h-SiOx)(n=2) multistructure barrier films are deposited on both sides of a poly(ethylene terephthalate) substrate using a combination of low-pressure plasma-enhanced chemical vapor deposition and dip coating. The deposited films show a high average transmittance (400-700 nm) of 84% and an ultralow water vapor transmission rate of 2 x 10-6 g/m(2)/day. In the electroluminescence characteristics of OLEDs encapsulated with two triad barrier films, the operational lifetime (T-50) of OLEDs is 1584 h, which is almost similar to that (1416 h) of OLEDs encapsulated with a glass lid.
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