Sub-wavelength GHz-fast broadband ITO Mach-Zehnder modulator on silicon photonics

Here we demonstrate a spectrally broadband, gigahertz-fast Mach-Zehnder interferometric modulator exhibiting a miniscule V pi L of 95 V . mu m, deploying a subwavelength short electrostatically tunable plasmonic phase shifter based on heterogeneously integrated indium tin oxide thin films into silicon photonics. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement