期刊
CARBON LETTERS
卷 30, 期 6, 页码 595-601出版社
SPRINGER JAPAN KK
DOI: 10.1007/s42823-020-00129-x
关键词
SU-8 photoresist; Deep UV; Electric heater; Carbonization; Carbon thin film
资金
- Korea Institute of Energy Technology Evaluation and Planning (KETEP) - Ministry of Trade, Industry AMP
- Energy (MOTIE) of the Republic of Korea [20164010201070]
We report the structural characterization and electric heating performance of carbon thin films (CTFs), which were prepared from negative-type SU-8 photoresist by deep UV exposure and following carbonization. The prepared CTFs were found to have pseudo-graphitic carbon structures containing partially graphite domains in the amorphous carbon matrix. The CTFs showed a very smooth surface morphology with a roughness of 0.42 nm. The 107 nm-thick CTFs exhibited an excellent electric heating performance by attaining a high maximal temperature of 207 degrees C and a rapid heating rate of 13.2 degrees C/s at an applied voltage of 30 V. Therefore, the CTFs prepared in this study can be applied as electrode materials for high-performance electric heaters.
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