期刊
SURFACE ENGINEERING
卷 37, 期 2, 页码 148-153出版社
TAYLOR & FRANCIS LTD
DOI: 10.1080/02670844.2020.1746493
关键词
Titanium chromium nitride; micro-Raman spectroscopy; ultraviolet-visible spectroscopy; co-sputtering
资金
- Research Council of the Iran University of Science and Technology
Titanium chromium nitride (TiCrN) films were prepared using co-sputtering under different nitrogen flow rates, leading to changes in crystal structure and grain size. Micro-Raman spectroscopy revealed the presence of various vibrational transitions, while ultraviolet-visible spectroscopy showed potential applications of these coatings in underwater UV photodetector designs.
Titanium chromium nitride (TiCrN) films were prepared under various nitrogen flow rates (7-18 sccm) via co-sputtering. It was argued that the target poisoning effect governs the deposition process in nitrogen-rich atmospheres. The observed X-ray diffraction patterns suggested that the crystal structure of TiCrN coatings is a cubic close-packed (TiCr)N solid solution with (111) crystalline planes. The patterns also implied that the increased nitrogen content is accompanied by a tendency towards crystallite size enlargement. In addition to the main vibrational transitions, the micro-Raman spectroscopy detected the Raman third-order vibrational transition (2A + O) and a peak corresponding to one of the Raman second-order transitions (A + O). It was also revealed that the area under the peaks corresponding to chromium nitride first-order and second-order acoustic vibrational transitions increase with the increase in the nitrogen content of the samples. Ultraviolet-visible spectroscopy showed that the coatings can have a potential application in under-marine UV photodetector designs.
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