期刊
SURFACE ENGINEERING
卷 37, 期 4, 页码 414-421出版社
TAYLOR & FRANCIS LTD
DOI: 10.1080/02670844.2020.1759017
关键词
Pulsed laser deposition; DLC film; 3D curved surface; Raman spectroscopy; infrared spectrum; uniform transmittance
This research successfully grown uniform DLC films on large curved silicon substrates using a 3D motion deposition setup and correlated mathematical models. The results showed similar optical constants of the DLC films in different regions and low deviation in average transmittance in the medium infrared band, improving infrared detection imaging performance. This study contributes to expanding the application of pulsed laser deposition in the optical field.
It is difficult to grow uniform film by pulsed laser deposition because the spatial distribution of the laser-induced plume is a forward-directed cone-shape. A 3D-motional deposition setup was founded, and the correlative mathematical model of the film thickness on the 3D curved surface was deduced. Based on simulation and optimization, the diamond-like carbon (DLC) film was grown onto the large curved silicon substrate. According to the infrared transmittance spectra, the optical constants of the DLC film samples at different regions on the curved substrate were similar, indicating that the DLC film prepared onto the curved surface was homogeneous. Meanwhile, the deviation of average transmittance in the medium infrared band was below 2.3%, which could improve the imaging performance of the infrared detection. This research is useful to expand the application of the pulsed laser deposition in the optical field.
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