期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 312, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2020.112106
关键词
Capacitive pressure sensor; Electromechanical performance; Porous dielectric layer; Super elasticity
资金
- National Natural Science Foundation of China [51703083]
Flexible, sensitive and largescale normal pressure sensors are in high demand of rapid development of healthcare and e-skin systems. In this paper, a new capacitive normal pressure sensor was fabricated based on a dielectric layer of superelastic polydimethylsiloxane (PDMS) with uniformly distributed micro-pores. The micro-pores were formed through vacuum-assisted infiltration of PDMS solution using sugar particles as porogen. Results showed that the PDMS layer with uniform micro-pores without sugar residue was successfully obtained. The developed sensor experimentally displayed a high elasticity, a large sensing pressure range ( > 200 kPa), a high sensitivity (0.023 kPa1), a good hysteresis, a fast response (about 155 ms) and a good structural stability and durability for using more than 1000 cycles. Demonstrations of the fabricated sensor in detecting finger grabbing and plantar pressure were performed, indicating it a high potential in the future use of e-skin or rehabilitation monitoring system. (C) 2020 Elsevier B.V. All rights reserved.
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