期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 91, 期 3, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.5126957
关键词
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资金
- National Science Foundation [1840145]
- National Institutes of Health [R21EB028069]
- Div Of Chem, Bioeng, Env, & Transp Sys
- Directorate For Engineering [1840145] Funding Source: National Science Foundation
The negative photoresist SU-8 has attracted much research interest as a structural material for creating complex three-dimensional (3D) microstructures incorporating hidden features such as microchannels and microwells for a variety of lab-on-a-chip and biomedical applications. Achieving desired topological and dimensional accuracy in such SU-8 microstructures is crucial for most applications, but existing methods for their metrology, such as scanning electron microscopy (SEM) and optical profilometry, are not practical for non-destructive measurement of hidden features. This paper introduces an alternative imaging modality for non-destructively characterizing the features and dimensions of SU-8 microstructures by measuring their transmittance of 365 nm ultraviolet (UV) light. Here, depth profiles of SU-8 3D microstructures and thin films are determined by relating UV transmittance and the thicknesses of SU-8 samples imaged in the UV spectrum through the Beer-Lambert law applied to the images on a pixel-by-pixel basis. This technique is validated by imaging the UV transmittance of several prototype SU-8 3D microstructures, including those comprising hidden hollow subsurface features, as well as SU-8 thin-films, and verifying the measured data through SEM. These results suggest that UV transmittance imaging offers a cost-effective, non-destructive technique to quickly measure and identify SU-8 microstructures with surface and hidden subsurface features unlike existing techniques.
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