期刊
OPTICAL ENGINEERING
卷 59, 期 5, 页码 -出版社
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.OE.59.5.055108
关键词
vacuum ultraviolet; spectral purity filter; transmittance measurement; high order harmonics suppression
类别
资金
- National Natural Science Foundation of China [11875204, 11775295, 11705259, 11575127, U1932167]
- NSAF Joint Foundation [U1930119]
- Fundamental Funds for Central Universities [221201880070]
- youth Innovation Promotion Association of the Chinese Academy of Sciences [2018295]
A spectral purity Al/Yb/Al filter for the wavelength range of 50 to 100 nm has been designed, fabricated, and characterized. The spectral analysis and transmittance measurements were performed in the wavelength range of 50 to 80 nm and 50 to 100 nm. The spectral analysis measurement results show that high-order harmonics greater than 10 nm can be efficiently suppressed. Transmittance measurement results show that the filter has the ability of harmonic suppression in the wavelength range of 50 to 95 nm. The fitting result of the transmittance measurement result indicated that lower measured transmittance was mainly caused by the interdiffusion and oxidation of the filter. (C) 2020 Society of Photo-Optical Instrumentation Engineers (SPIE).
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