期刊
NANOTECHNOLOGY
卷 31, 期 36, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/1361-6528/ab957b
关键词
dry patterning; nanostructures; carbon nanotubes; electrical discharge; electron emission
资金
- Office of Naval Research [N00014-17-1-2521]
- Robert A Welch Foundation [AT-0029]
We report a new dry-state technique for non-contact patterning of nanostructured conducting materials, and demonstrate its use for carbon nanotube forests and freestanding sheets of carbon nanotubes, graphene, graphene sponge, and MXene. This method uses self-generated electron-emission pulses (similar to 20 ns) in air. On a substrate-tip separation scale of 10 to 20 nm, the few molecules of gas at atmospheric pressure enables electron-emission-based interaction between a sharp tungsten tip and elements of nanostructured materials. Using the advantages of field enhancement at sharp ends of nanostructured materials, the discharge voltage is reduced to 25-30 V, depending upon the materials density. This method causes largely non-oxidative sequential decomposition of nanostructure elements neighboring the tungsten tip. The main decomposition mechanism is thermal dissociation facilitated by Joule heating and electrostatic removal of debris. The non-contact-based patterning of nanomaterials can be as fast as 10 cm s(-1). The resulting precisely patterned structures (<200 nm) are largely free of foreign contaminants, thermal impact and sub-surface structural changes.
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