期刊
MICROELECTRONIC ENGINEERING
卷 227, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.mee.2020.111312
关键词
Laser materials processing; Security marking; Microstructure fabrication; Computer-generated holograms; Metals
Holographic optical elements (HOE) are fabricated on silver by means of laser engraving using a cost effective ns fiber laser system developed for this scope, emitting at 1070 nm, for the first time to the authors' knowledge. Various HOEs are designed using commercially available software and fabricated on the sample surface. The developed methodology is presented and analyzed in terms of laser parameters. The fabricated HOEs are evaluated both structurally and optically.
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