期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 29, 期 2, 页码 248-254出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2020.2971017
关键词
Thermoresistive; micro calorimetric flow sensors; CMOS MEMS; high sensitivity; improved accuracy
类别
资金
- High-Talent Research Funding [827-000451]
- Natural Science Foundation of SZU [860-2110309, 85304-211]
- Hong Kong ITF via HKUST-MIT Research Consortium [ITS/410/16FP]
In this paper, we report a two-dimensional (2D) Thermoresistive Micro Calorimetric Flow (TMCF) sensor by using a 0.35 2P4M CMOS MEMS technology. For the airflow, the fabricated and the open-space packaged 2D flow sensor system achieved the highest normalized sensitivity of 32 mV/W/(m/s) with respect to input heating power and gain. To overcome the sensor output drifting issue due to the locally redistributed fluid flow near the bonding wires, a digital signal conditioning algorithm using the inverse distance weighting (IDW) method, instead of the conventional fitting method with sine and cosine function, was proposed. Accordingly, the calibrated 2D flow sensor showed an improved velocity accuracy of +/- 4% and the angle accuracy of +/- 3 degrees for an input airflow from 0 to 20 m/s. Therefore, the developed highly sensitive 2D TMCF sensor will be a promising device for the airflow measurement in the smart buildings and the meteorological monitoring system. [2019-0259]
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