期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 29, 期 2, 页码 190-201出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2020.2970609
关键词
Resonators; Resonant frequency; Micromechanical devices; Thermal stability; Temperature measurement; Heating systems; Resonators; timing
类别
资金
- Defense Advanced Research Projects Agency Precise Robust Inertial Guidance for Munitions Program [N66001-16-1-4023]
We demonstrate two novel dual-mode ovenized MEMS resonators, each with an in-chip device layer micro-oven that utilizes less than 30mW for resonator temperature control over variations in external temperature from -40 degrees C to +60 degrees C. The device layer micro-oven enables correction for ambient temperature variations and achieves a 1-week frequency stability for the output mode over temperature near 1.5 ppb for the Lame-mode resonator. The devices were built in the Epi-Seal fabrication process and take advantage of the exceptional long-term stability of MEMS resonators built in that process. These results exceed all prior reports for frequency stability over time and temperature for MEMS resonators and have the potential to impact the development of miniature, low-power time references. [2019-0054]
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