Design, construction and performance of a TOF-SIMS for analysis of trace elements in geological materials

A new TOF-SIMS with high spatial and mass resolution has been constructed and applied to the in-situ micro-scale analysis of trace elements in geological materials with complex structural and chemical features. Double second-order reflectrons without mesh between different electric field regions of achieve greatly improved secondary ion transmission and mass resolution. The new TOF-SIMS can produce an O-2(-) beam of ca. 5 mu m diameter with a beam intensity of ca. 5 nA and a secondary ion mass resolution of more than 20,000 (FWHM). Functionality has been demonstrated by the analysis of Ti and rare earth elements in zircon. (C) 2020 Elsevier B.V. All rights reserved.