期刊
CERAMICS INTERNATIONAL
卷 42, 期 15, 页码 17123-17127出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2016.07.225
关键词
TiO2-x film; Substrate temperature; Crystallinity; Resistivity; 1/f noise parameter
资金
- department of Electrical Engineering at the Korea Advanced Institute of Science and Technology (KAIST), South Korea under Brain Korea 21 plus (BK21) program
In this study, we investigated the substrate temperature (T-s) dependent bolometric properties on TiO2-x films for infrared image sensor applications. The film crystallinity was changed from amorphous to rutile phase with increasing the T-s. The decrement of resistivity with temperature in TiO2-x test-devices confirms the typical semiconducting property. All the test pattern devices have linear I-V characteristic performance which infers that the ohmic contact was well formed at the interface between the TiO2-x and the Ti electrode. The resistivity, activation energy (E-a) and the temperature coefficient of resistance (TCR) values of the device samples were decreased up to 200 degrees C of T-s. The sample deposited at 200 degrees C had a significantly low 1/f noise parameter and a high universal bolometric parameter (beta). However, at the substrate temperature of 250 degrees C, the E-a, TCR and the 1/f noise values were increased due to increase of the resistivity. The TCR and the 1/f noise values are proportional to the resistivity of TiO2-x films. As a result, the low resistivity of TiO2-x sample deposited at 200 degrees C is a viable bolometric material for uncooled IR image sensors. (C) 2016 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
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