期刊
IEEE SENSORS JOURNAL
卷 20, 期 9, 页码 4618-4627出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2020.2966415
关键词
Graphene; graphene dry transfer; PMMA; Raman; resonant frequency; acoustic resonator; MEMS
资金
- U.K. Engineering and Physical Sciences Research Council (EPSRC)
- EPSRC [EP/M026914/1] Funding Source: UKRI
Large area graphene-poly (methylmethacrylate) (PMMA) closed cavity resonator has been fabricated. The resonator has been formed by transferring an ultra-large graphene-PMMA membrane over 3.5 mm diameter circular closed cavity with 220 mu m depth. The graphene-PMMA membrane includes 6-layer graphene and 450 nm PMMA film. A modified graphene-PMMA dry transfer method has been developed in this work. Using the Kapton tape supporting frame, the graphene-PMMA membrane has been dry transferred onto the substrate with a small membrane's static deformation of around 180 nm. The membrane's static deformation aspect ratio (suspended membrane's diameter over the membrane's deformation) is around 19,500. The graphene-PMMA closed cavity resonator has been actuated mechanically, acoustically and electro-thermally. The dynamic behaviour of the membrane suspended over the closed cavity shows that the (1, 1) mode dominates the graphene-PMMA membrane's resonance with a resonant frequency of around 10 kHz and suggests the device is under good gas encapsulation. Acoustic vibration amplitude sensitivity of graphene-PMMA membrane over the closed cavity is measured to be around 6 mu m/Pa. The membrane's dynamic behaviour, simulated under similar mechanical and electro-thermal actuation conditions, has been shown to be consistent with the trend of the device's experimental results. The strain in the suspended graphene-PMMA membrane is estimated to be 0.04 +/- 0.01 %.
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