期刊
IEEE PHOTONICS TECHNOLOGY LETTERS
卷 32, 期 7, 页码 414-417出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2020.2977324
关键词
Glass; Microfluidics; Optical fiber sensors; Reservoirs; Liquids; Optical fibers; Integrated additive and subtractive manufacturing; multi-laser processing; glass 3D printing; microfluidics; fiber-optic sensing
资金
- U.S. Department of Energy [DE-FE0031826]
- National Institutes of Health [P20-GM121342]
This letter reports a novel fused silica microfluidic device with pressure sensing capability that is fabricated by integrated additive and subtractive manufacturing (IASM) method. The sensor consists of a capillary and a 3D printed glass reservoir, where the reservoir volume change under pressure manifests liquid level deviation inside the capillary, thus realizing the conversion between small pressure change into large liquid level variation. Thanks to the design flexibility of this unique IASM method, the proposed microfluidic device is fabricated with liquid-in-glass thermometer configuration, where the reservoir is sealed following a novel 3D printing assisted glass bonding process. And liquid level is interrogated by a fiber-optic sensor based on multimode interference (MMI) effect. This proposed microfluidic device is attractive for chemical and biomedical sensing because it is flexible in design, and maintains good chemical and mechanical stability, and adjustable sensitivity and range.
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