期刊
CERAMICS INTERNATIONAL
卷 42, 期 2, 页码 2582-2588出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2015.10.061
关键词
Gallium oxide; IGZO; Polymerized complex method; Precipitation method
资金
- Energy Efficiency & Resources of the Korea Institute of Energy Technology Evaluation and Planning (KEMP) - Korea government Ministry of Knowledge Economy [20125020100010]
- Korea Evaluation Institute of Industrial Technology (KEIT) [20125020100010] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
The morphology and crystal structure of gallium oxide (Ga2O3) particles synthesized using a simple precipitation process and a polymerized complex method were investigated. TG-DSC and SEM analysis were performed to characterize the phase transition temperature and morphology of Ga2O3 particles. In-situ high temperature XRD analysis revealed the crystal structural change of Ga2O3 particles from room temperature to 1000 degrees C. The morphology and diameter of Ga2O3 particles prepared using the precipitation method were dependent on the concentration of the starting Ga(NO3)(3) solution and temperature during the aging step. Ga2O3 particles obtained by the polymerized complex method were generally spherical shaped particles with diameters of several tens nanometers, and the particle size was mainly determined by the concentration of the starting Ga(NO3)(3) solution and calcination temperature. The crystal structure of Ga2O3 prepared by the precipitation method was changed from rhombohedral to monoclinic phase at 700 degrees C, while monoclinic Ga2O3 was directly obtained from the raw material without phase transformation in the polymerized complex method. (C) 2015 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
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