期刊
CARBON
卷 161, 期 -, 页码 403-412出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.carbon.2020.01.064
关键词
Carbon nanowalls; Vertical graphene; Chemical vapor deposition; High-voltage nanosecond pulses
Carbon nanowalls (CNWs) are vertically standing, interconnecting flake- or wall-like collections of graphene sheets. In the present work, this material was synthesized by applying precisely controlled high-voltage nanosecond pulses to a substrate using an inductor energy storage circuit in a radicalinjection plasma-enhanced chemical vapor deposition system, employing a CH4/H-2 plasma. The resulting interconnected networks had a low density of CNWs with large average wall-to-wall distances. During the application of short-period pulses, the entire substrate surface was uniformly activated, thus enhancing the adsorption of carbon precursors and preventing CNW nucleation. As a result, an amorphous carbon film covered the surface of the substrate and a low CNW density was obtained with average wall-to-wall distances greater than 700 nm. On the basis of these results, the growth mechanism of CNWs was modeled. (C) 2020 Elsevier Ltd. All rights reserved.
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