期刊
ACS APPLIED MATERIALS & INTERFACES
卷 12, 期 23, 页码 26405-26412出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsami.0c01493
关键词
open-air plasma processing; thin film barrier coatings; scalable deposition; perovskite solar cells; stability
资金
- National Science Foundation as part of the National Nanotechnology Coordinated Infrastructure [ECCS-1542152]
- Durable Module Materials Consortium (DuraMAT), an Energy Materials Network Consortium - U.S. Department of Energy, Office of Energy Efficiency and Renewable Energy, Solar Energy Technologies Office
- National Science Foundation Graduate Research Fellowship [DGE-1656518]
Emerging moisture sensitive devices require robust encapsulation strategies to inhibit water ingress and prevent premature failure. A scalable, open-air plasma process has been developed to deposit alternating layers of conformal organosilicate and dense SiO2 thin-film barriers to prevent moisture ingress. The in situ low-temperature process is suitable for direct deposition on thermally sensitive devices and is compatible with flexible polymeric substrates. Using optical calcium testing, low water vapor transmission rates on the order of 10(-3) g/m(2)/day at an accelerated aging condition of 38 degrees C and 90% relative humidity (RH) are achieved. Using moisture-sensitive perovskite devices as a representative moisture-susceptible device, devices retain over 80% of their initial performance for over 660 h in a 50 degrees C 50% RH accelerated aging environment. The ability of the multilayer barrier to enable device resistance to humid environments is crucial toward realizing longer operating lifetimes.
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