期刊
CARBON
卷 105, 期 -, 页码 163-175出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.carbon.2016.04.021
关键词
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资金
- Advanced Storage Technology Consortium ASTC [2011-012]
- National Science Foundation [DMR-1107642]
- Marie Curie International Outgoing Fellowship for Career Development within the 7th European Community Framework Programme [PIOF-GA-2012-328776]
- U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences [DE-AC02-98CH10886]
- NIH [RR003037]
- Division Of Materials Research
- Direct For Mathematical & Physical Scien [1107642] Funding Source: National Science Foundation
Due to their increased stability in extreme environments, relative to amorphous hydrogenated carbons (a-C:H), amorphous thin film silicon oxide-doped hydrogenated amorphous carbons (a-C:H:Si:O) are being commercially developed as solid lubricants and protective coatings. Although various properties of a-C:H:Si:O have been investigated, no definitive structure of a-C:H:Si:O has ever been proposed, nor has its thermally-induced structural evolution been thoroughly studied. The aim of this work is to better understand the structure of a-C:H:Si: O through solid-state nuclear magnetic resonance (NMR) and electron paramagnetic resonance (EPR) spectroscopies. Deeper insights into the thermally-driven structural evolution are obtained by annealing a-C:H:Si: O between 50 degrees C and 300 degrees C under anaerobic conditions and taking NMR/EPR measurements after each step. EPR results show that the number of paramagnetic defects decreases by 70% with annealing at 300 degrees C. H-1 NMR shows the hydrogen concentration decreases with annealing temperature from 2 x 10(22) g(-1), and then levels off at approximately 0.7 x 10(22) g(-1) for anneals between 200 degrees C and 300 degrees C. The carbonesiliconeoxygen network exhibits some structural reorganization, seen directly as a slight increase in the sp(2)/sp(3) ratio in the C-13 NMR with annealing. These results combined with relaxation data are interpreted according to a two-component structure largely defined by differences in hydrogen and defect contents. (C) 2016 Elsevier Ltd. All rights reserved.
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