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Development of a lateral velocity-controlled MEMS vibratory gyroscope and its performance test
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JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2008)
A MEMS-based piezoelectric power generator array for vibration energy harvesting
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MICROELECTRONICS JOURNAL (2008)
High-performance monolithic triaxial piezoresistive shock accelerometers
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SENSORS AND ACTUATORS A-PHYSICAL (2008)
Nanoscale memory cell based on a nanoelectromechanical switched capacitor
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NATURE NANOTECHNOLOGY (2008)
Development of miniaturized 6-axis accelerometer utilizing piezoresistive sensing elements
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SENSORS AND ACTUATORS A-PHYSICAL (2007)
A monolithic three-axis micro-g micromachined silicon capacitive accelerometer
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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2005)
Study of electrothermal V-beam actuators and latched mechanism for optical switch
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JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2005)
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IEEE INSTRUMENTATION & MEASUREMENT MAGAZINE (2003)
A vacuum packaged surface micromachined resonant accelerometer
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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2002)
RF MEMS SWITCHES AND SWITCH CIRCUITS
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IEEE MICROWAVE MAGAZINE (2001)
Analytical Solutions of Sensitivity for Pressure Microsensors
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IEEE SENSORS JOURNAL (2001)
A high-performance planar piezoresistive accelerometer
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JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2000)