期刊
MICROMACHINES
卷 11, 期 1, 页码 -出版社
MDPI
DOI: 10.3390/mi11010007
关键词
MEMS sensor; zero-power sensor; flexible sensor; human-machine interface; machine learning; artificial intelligence
类别
资金
- HIFES Seed Funding: Hybrid Integration of Flexible Power Source and Pressure Sensors at the National University of Singapore (NUS), Singapore [R-263-501-012-133]
- A*STAR-NCBR research grant of Chip-Scale MEMS Micro-Spectrometer for Monitoring Harsh Industrial Gases at the NUS, Singapore [R-263-000-C91-305]
- RIE Advanced Manufacturing and Engineering (AME) programmatic grant at NUS, Singapore [A18A4b0055]
- NRF Competitive Research Programme-15th at NUS, Singapore [R-263-000-C24-281]
With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings' manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.
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