期刊
THIN SOLID FILMS
卷 696, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2019.137759
关键词
Zinc oxide; Silver oxide; Sputtering; Transparent conductive multilayer; Optoelectrical properties
类别
资金
- Basic Science Research Program through the National Research Foundation of Korea (NRF) - Ministry of Science and ICT [NRF-2016R1A2B4014848]
The aim of this study is to investigate the optoelectrical properties of hybrid electrodes based on ZnO/Ag(or AgOx)/ZnO multilayer structures. ZnO/Ag/ZnO and ZnO/AgOx/ZnO multilayer films were prepared with the sputtering technique at room temperature. To evaluate the effect of thickness and oxidation of a middle Ag layer on the structural, electrical, and optical properties, the thickness and oxygen concentration of the mid-layer film were varied from 6 to 16 nm and from 0 to 2.1 at.%, respectively. Differences in the structural and opto-electrical characteristics of these hybrid electrodes were analyzed using several analytical techniques, including scanning electron microcopy, ultraviolet visible spectrophotometry, four-point probe, and Hall effect measurement. The characteristics of these ZnO/Ag(or AgOx)/ZnO multilayer films depended on the thickness and oxygen concentration of the mid-layer film. Haccke's figure of merit of a ZnO(30 nm)/AgOx(12 nm, oxygen 1.5 at.%)/ZnO(30 nm) electrode was calculated to be 24.53 x 10(-3) Omega(-1), with sheet resistance and average transmittance (lambda = 400-800 nm) of 86.53 % and 9.59 O/sq, respectively.
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