期刊
THIN SOLID FILMS
卷 693, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2019.137610
关键词
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类别
资金
- Program Committee
- General Affairs Committee
- International Advisory Committee
- International Organizing Committee
- City of Kitakyushu
- Kitakyushu Convention and Visitors Association
- Murata Science Foundation
- Gas-Phase Growth Ltd.
- ULVAC, Inc.
- ALS Technology Co.. Ltd.
- Techno Research., Ltd.
- VIC International Co., Ltd.
- Cornes Technologies (Blue wave semiconductor/Seki Diamond Systems)
- Yoshikawa Vacuum Corp.