Dynamic modeling and validation of a novel 3-DOF flexible thin sheet nano-manipulator with piezoelectric material bonded

In this paper, we investigate a 3-DOF (degree-of-freedom) piezoelectric nano-manipulator designed with flexible flexures and unimorph piezoelectric thin sheet actuators, allowing for high-precision motions with a compact size and fast dynamics response. Based on the Lagrange's equations, the dynamic model of the proposed motion system is established by equivalent approximations of the distributed parameter dynamics and the piezoelectric-mechanical coupling effect. Comprehensive simulations and experiments are also conducted on the flexible piezoelectric nano-manipulator with piezoelectric thin sheets (PZT-5A) under various electric fields, where the proposed model agrees well with simulations and experiments. The proposed modeling approach provides the basis for the model-based feedback controller design of such systems.