期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 305, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2019.127481
关键词
NiO nanostructures; Room temperature; Gas sensors; NO2; Model
资金
- project Materiali innovativi e nanostrutturati per microelettronica, energia e sensoristica - Linea di intervento 2 (Univ. Catania, DFA)
- project Sviluppo di tecnologie e sistemi avanzati per la sicurezza dell'auto mediante piattaforme ADAS - ADAS+ [ARS01_00459, CUP E66C18000410005]
NiO-based NO2 sensors operating at room temperature are attracting great attentions due to their promising energy and cost saving performances. However, only a few reports showed high sensitivity and selectivity in the sub-ppm concentration range and low limit of detection (LoD). In this work, we designed and fabricated by a low-cost chemical bath deposition (CBD) and thermal annealing a nanostructured and porous NiO thin film (nanoporous NiO film) composed of NiO nanoparticles (30-50 nm). The nanoporous NiO film was then applied as sensing element for the NO2 detection at room temperature, demonstrating a high response to sub-ppm level NO2 (140 ppb), excellent selectivity and stability, and a very low LoD of 20 ppb. The NO2 sensing mechanism was investigated and satisfactorily modelled by two energetically different and independent adsorption sites at room temperature. Both sites contribute to the NO2 detection at room temperature while only one site contributes at higher temperatures. The described low-cost fabrication method and the discussed superior NO2 sensing performances at room temperature make the nanoporous NiO film a promising NO2 sensor for environmental monitoring.
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